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Vacuum Plasma Cleaner Machine
The cleaning flow of the vacuum plasma machine: load the products into vacuum chamber—-start the engine to exhaust the room to a standard vacuum level of about 10Pa (this usually takes a few minutes) —-inlet the gas (oxygen, argon, hydrogen, nitrogen, carbon tetrafluoride, etc.) into the vacuum chamber and keep the inside pressure stable—-apply high-frequency voltage in the vacuum chamber to penetrate the gas and occur of plasma, and begin to cleaning process. —- After cleaning finishing, cut off the power supply, and the gas and vaporized dirt are extracted and discharged by the vacuum pump.
We have a full range of vacuum plasma cleaner machine, please contact us to discuss your individual requirement.
The plasma process is a gas-solid phase dry reaction, with no need for water or chemicals and no pollution to the environment.
Wide applicability: all types of substrates can be treated, such as metals, semiconductors, oxides, most polymer materials, etc.
Low temperature, close to room temperature, especially suitable for polymer materials.
It is a simple device, easy to operate and maintain, and a much lower cost than wet cleaning.
Model | HW-PL100 |
Dimension (W*H*D) | 1100*1030*1680mm |
Vacuum chamber size(W*H*D) | 500*450*500mm |
Vacuum chamber material | 316 stainless steels |
Flow controller | 0-800ml/min |
Cleaning time | 1-9999s adjustable |
Volume | 100L |
Plasma source power | 0-500W adjustable |
RF power frequency | 13.56MHZ |
General power | 3kw |
Control system | PLC+ touch screen |
Working vacuum | 9-30Pa |
Power supply | AC380V, 50/60HZ |
Built-in horizontal electrode | 5 layers |
Hot Tags: Vacuum Plasma Cleaner, Plasma Cleaner, China, Custom, Customized, wholesale, discount, manufacturers, factory, suppliers, for sale, quotation, made in China
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